Thick film thermal oxide film from KST WorldTo obtain the world's highest market share with superior surface cleanliness and stable quality.
Thick film thermal oxide film from KST WorldTo obtain the world's highest market share with superior surface cleanliness and stable quality.
Thick film thermal oxidation film" purpose
Undercladding wafer for AWG
SiO2 films called Under clad layers are critical to yield in array waveguide gratings (AWG).
§ Guarantee specifications
project | specifications |
Film thickness | 20um±5% (Maximum film thickness) |
In-plane homogeneity | ±0.5% |
Interfacial homogeneity | ±0.5% |
The refractive index (@ 1550 nm) | 1.4458±0.0001 |
§ Standard list
size | The thickness of the wafer | Thermal oxide film thickness |
4inch | 525um 1mm | 15um、20um |
6inch | 625um 675um 1mm | 15um、20um |
8inch | 725um | 15um、20um |
12inch | 775um | 15um |
Other wafer sizes and film thickness can be customized (thickness range: 0.1-30 m)
§ The surface roughness data is distributed in the refractive index plane
§ Clean room
Thick film thermal oxidation film" purpose
Undercladding wafer for AWG
SiO2 films called Under clad layers are critical to yield in array waveguide gratings (AWG).
§ Guarantee specifications
project | specifications |
Film thickness | 20um±5% (Maximum film thickness) |
In-plane homogeneity | ±0.5% |
Interfacial homogeneity | ±0.5% |
The refractive index (@ 1550 nm) | 1.4458±0.0001 |
§ Standard list
size | The thickness of the wafer | Thermal oxide film thickness |
4inch | 525um 1mm | 15um、20um |
6inch | 625um 675um 1mm | 15um、20um |
8inch | 725um | 15um、20um |
12inch | 775um | 15um |
Other wafer sizes and film thickness can be customized (thickness range: 0.1-30 m)
§ The surface roughness data is distributed in the refractive index plane
§ Clean room